The coherence function for optical metrology: a new paradigm and the role of information theory and compressed sensing
Veröffentlichungsdatum
2023-08-10
Zusammenfassung
The coherence function offers new possibilities for optical metrology not available with conventional wave field sensing. Its measurement involves spatio-temporal sampling of wave fields modulated by the object under investigation. While the evaluation of the coherence function is more elaborate than conventional approaches, an information theoretical treatment shows that it also delivers more information about the object under investigation. In order to achieve efficient information extraction from the coherence function, advanced approaches involving compressed sensing are required to obtain optical metrology techniques that are simultaneously precise, robust and fast as well as suited for complex measurement situations.
Schlagwörter
Compressed sensing
;
Optical metrology
;
Information theory
;
Optical coherence
;
Cameras
;
Interferograms
;
Terahertz radiation
Verlag
Society of Photo‑Optical Instrumentation Engineers (SPIE)
Institution
Dokumenttyp
Konferenzbeitrag
Zeitschrift/Sammelwerk
Zweitveröffentlichung
Ja
Dokumentversion
Published Version
Lizenz
Alle Rechte vorbehalten
Sprache
Englisch
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Name
Bergmann et al_The coherence function for optical metrology_2023_published-version.pdf
Size
4,31 MB
Format
Adobe PDF
Checksum
(MD5):1e24dfd73990f83743772fc9ad441c1c