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Proceedings Volume 11782, Optical Measurement Systems for Industrial Inspection XII
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Item-typ:Veröffentlichung, Speckle pattern modulation for high-resolution displacement measurements(Society of Photo‑Optical Instrumentation Engineers (SPIE), 2021-06-20); ; ; For digital image speckle correlation (DISC), a novel approach is introduced where an ensemble average over multiple different speckle patterns is calculated. As a result, the measurement uncertainty of the displacement is reduced by an order of magnitude without deteriorating the spatial resolution. This enables precise surface displacement field measurements in the micrometer range with a measurement uncertainty lower than 100nm at a spatial resolution below 20 μm. By using a digital micromirror device (DMD) for illumination modulation, measuring rates in the range of 25 Hz are possible while each measurement is based on 80 images.Konferenzbeitrag56 82