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Citation link: http://nbn-resolving.de/urn:nbn:de:gbv:46-00105200-17
00105200-1.pdf
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CVD diamond deposition under atmospheric conditions on steel with a silicon intermediate layer


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Authors: Prieske, Markus 
Supervisor: Vollertsen, Frank  
Abstract: 
In order to realize dry metal forming, the requirements of the surface layer, e.g. to load-bearing capacity and tribological properties are increasing. Therefore, the feasibility of chemical vapour deposition (CVD) of diamond onto tool steel 1.2379 under atmospheric conditions without a vacuum chamber is investigated, so that there is no limit according to the size of the tool. For the deposition of CVD diamond coatings, a laser-based plasma CVD process combined with a physical vapour dep-osition (PVD) process is used. It is shown that a PVD silicon layer serves as diffusion barrier for the subsequent deposition of a CVD diamond layer. The diffusion barrier as well as the CVD diamond layer is analysed by laser microscope meas-urements, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. The crystal structure of the diamond films is verified by Raman spectroscopy and laser microscope measurements. To visualize the coating system, a focused ion beam is used to generate a cross-section. The local deposition of a CVD di-amond layer onto tool steel without the need for a vacuum chamber is evidenced by these investigations.
Keywords: CVD diamond, PVD coating, diffusion barrier, steel
Issue Date: 2016
Journal: Dry Metal Forming Open Access Journal 
Band: Volume 2
Type: Zeitschriftenartikel
URN: urn:nbn:de:gbv:46-00105200-17
Institution: Universität Bremen 
Faculty: FB4 Produktionstechnik 
Institute: BIAS - Bremer Institut für angewandte Strahltechnik GmbH 
Appears in Collections:Forschungsdokumente

  

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