Elektronen-induzierte Reaktionen von Koordinationspolymeren zur Nanostrukturierung von Oberflächen

Electron-induced reactions play a central role in the development of current methods for nanostructuring of surfaces. The basic principle is the decomposition of metal-containing compounds by a focused electron beam. In the present work the electron-induced reactions of three different copper-containing materials, namely, copper(II) oxalate, copper(II) squarate, and copper(II) 1,3,5-benzenetricarboxylate, were examined in detail. Reflection absorption infrared spectroscopy (RAIRS) and X-ray photoelectron spectroscopy (XPS) were used to identify chemical surface species that are formed upon electron exposure. To determine volatile decomposition products the electron-stimulated desorption (ESD) of neutral fragments was monitored with a new designed UHV setup. In addition, morphological changes of the samples were investigated by helium ion microscopy (HIM). It was shown that the molecular structure of the used anions is decisive for the efficiency and the outcome of the electron-induced decomposition. As an example, surface-bound layers of copper(II) oxalate were identified as suitable precursors for the production of metallic nanoparticles.