Exploring the coherence function for optical metrology and beyond
Date Issued
2022-05-20
Author(s)
Abstract
I will report on several strategies to exploit the structure of the coherence function for optical metrology and wave field analysis in general. For the case of optical metrology, I will show that properties like the surface topology or refractive index distributions can be determined by solely investigating the coherence function of light that has previously interacted with the specimen under test. Since the coherence function can be measured by a simple shear interferometer, this suggests that a large variety of metrology tasks can be accomplished by a common-path architecture. A prime advantage of this approach is the combination of interferometric precision with inherent mechanical robustness. Furthermore, because a shear interferometer is essentially an imaging system that provides a twin-image, methods based on sensing the coherence function are very flexible and largely independent from the distance between sensor and object.
Subjects
interferometry
;
Interferometers
;
Coherence (optics)
;
Wavefronts
;
Fourier transforms
;
Optical metrology
;
Spatial light modulators
Publisher
Society of Photo‑Optical Instrumentation Engineers (SPIE)
Institution
Type
conference paper
Journal/Edited collection
Secondary publication
Yes
Document version
Published Version
License
Alle Rechte vorbehalten
Language
English
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Falldorf_Exploring the coherence function for optical metrology and beyond_2022_published-version.pdf
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2 MB
Format
Adobe PDF
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