Simons, MarcelMarcelSimonsRadel, TimTimRadelSeefeld, ThomasRadel, TimMattulat, Thorsten2022-11-212022-11-212022-11978-3-933762-70-2https://media.suub.uni-bremen.de/handle/elib/631910.26092/elib/1881To meet the increasing trend of miniaturization, new (non-conventional) manufacturing processes are constantly being developed. The laser chemical process describes one of these non-conventional removal process in the microscale, based on the thermochemical dissolution of metals. To determine the influence of electrolyte concentrations, linear cavities were created in Titanium Grade 1 using phosphoric acid and sulfuric acid with different concentrations. The experimental results show that as the electrolyte concentration increases, the process window is reduced. One possibility for this is, as the electrolyte concentration increases, the viscosity increases, as well. With increasing viscosity, the electrolyte boiling process, which causes the shielding effect of the gas bubbles becomes more significant. Due to the increasing conductivity of the electrolyte at higher concentrations, the laser chemical removal rate increases within the process window at constant laser power. The maximum removal rate is observed at the maximum conductivity of the electrolyte.enCC BY 4.0 (Attribution)https://creativecommons.org/licenses/by/4.0/micromachiningshielding effectboiling620Artikel/Aufsatzurn:nbn:de:gbv:46-elib63198