Vollertsen, FrankMehrafsun, Salar2020-03-092020-03-092018-12-05https://media.suub.uni-bremen.de/handle/elib/1557This work deals with the process behavior of laser-induced thermochemical material removal of self-passivation metallic materials in order to enable a stable and process reliable micro structuring. The main focus hereby is on the identification of the causes and their influencing factors for the origin of discontinuities in process quality. The results show that laser-induced gas bubble formation, both by boiling of the electrolyte and by reaction-induced release of hydrogen, is a major contributor of the disruption of material removal. With the achieved knowledge and the model-based description of the removal process, suitable machining parameters for a high-quality and disturbance-free processing can be identified.delaser chemistrymicro structuringprocess dynamicsinfluencing variables620Dissertationurn:nbn:de:gbv:46-00107027-14