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Citation link: https://doi.org/10.26092/elib/3831

Publisher DOI: https://doi.org/10.1016/j.optlaseng.2020.106507
Falldorf et al_Lens-based phase retrieval-Part I_2021_accepted-version.pdf
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Lens-based phase retrieval under spatially partially coherent illumination - Part I: Theory


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Authors: Falldorf, Claas  
Agour, Mostafa  
Thiemicke, Fabian 
Bergmann, Ralf B.  
Abstract: 
We present a novel approach of phase retrieval using a 4f-imaging system, for the specific case of spatially partially coherent illumination. The theoretical investigation presented in Part I is based on scalar diffraction theory in combination with a heuristic approach. We find that the intensity of the de-focused speckle fields across the image plane shows sufficient contrast for phase retrieval, as long as the radius of the point spread function of the imaging system is well below the radius of the correlation area (spatial coherence) in the object plane. We also derive a useful relation, which allows to determine the requirements towards the essential parameters of an experimental setup, such as maximum propagation distance, diameter of the source, illumination distance and the numerical aperture of the imaging system. The consecutive paper, Part II, describes shape measurement based on the present treatise.
Keywords: Optical metrlology; Phase Retrieval; Wave field sensing; partially coherent illumination
Issue Date: Apr-2021
Publisher: Elsevier Science
Journal/Edited collection: Optics and Lasers in Engineering 
Volume: 139
Type: Artikel/Aufsatz
ISSN: 1873-0302
Secondary publication: yes
Document version: Postprint
DOI: 10.26092/elib/3831
URN: urn:nbn:de:gbv:46-elib89521
Institution: Universität Bremen 
Faculty: Fachbereich 01: Physik/Elektrotechnik (FB 01) 
Zentrale Wissenschaftliche Einrichtungen und Kooperationen 
Institute: BIAS - Bremer Institut für angewandte Strahltechnik GmbH 
MAPEX Center for Materials and Processes 
Appears in Collections:Forschungsdokumente

  

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