Thermische Bedingungen der laserchemischen Mikrobearbeitung von Metallen

This work deals with the identification of the temperature range for a high-quality laser chemical machining of metals with the aim to increase the process control and reproducibility. Therefore, an analytical model to compute the laser induced temperature distributions is developed and verified. A subsequent correlation with the resulting removal geometries as well as performed high-speed shadowgraphs prove that a disturbance-free removal is initiated after exceeding the electrolyte boiling point and is limited by the occurrence of film boiling. Moreover, the removal velocity is primarily determined by the induced temperature gradients and the interaction time. In view of miniaturization, the comparison of defined geometric and qualitative machining features with those of micro electrochemical machining and micro milling reveals the suitability of laser chemical machining to manufacture metallic parts with dimensions < 1 mm³.